Sputtered LiNi0.5Mn1.5O4 Thin Films for Lithium-Ion Microbatteries
Résumé
To power miniaturized and smart electronic devices, lithium-ion microbatteries with high energy densities remain the most attractive solution. The Ni-substituted LiMn2O4 spinel material seems to be the most promising high-performance electrodes to significantly enhance the energy density of Li-ion microbatteries. Sputtered LiNi0.5Mn1.5O4 (LNMO) films deposited on a metallic current collector are known to deliver high capacity values with high rate capabilities. In this paper, we propose a detailed study on the influence of sputtering deposition parameters (gas flow rate and bias voltage) to optimize the electrochemical properties of the electrodes and to carefully investigate the structure-electrochemical property relationship. © 2021 American Chemical Society.